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Measurement Technology for Micro-Nanometer Devices (4版)

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作者
Zhang
出版社
John Wiley
ISBN
9781118717967
版次
4
出版日期
2017/01
頁數
344
書籍開數、尺寸
25*17.7
重量
0.67 Kg

簡介

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices