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【經典溝通式教學法成人主教材全新大改版!!】
由ELT溝通式教學法大師Jack C. Richards所精心研發編寫，共分為四個級數，各級數亦提供 A/B上下兩冊版本，彈性配合老師授課時數安排。
Latest Topics:
加入全新聽力及閱讀篇章，並融入最新時事，提供師生與時俱進的討論話題。
Updated Images:
以多元實境照片取代舊版插畫圖片，使課程內容更加生動並貼近生活。
Online Practices:
學生課本附有線上自修練習(Online Self-study)，提供互動式學習資源。
內含單字、文法、聽力、口說、閱讀及影片練習活動。
Online resources:
線上教師資源豐富完備，可供免費下載，包含: 課程音檔、分級測驗、 單元複習考題、
額外學習單、課堂活動設計參考、教學資源規劃表等。
Classroom App:
結合第五版課程內容，提供多元互動式課堂活動。內含：投票、問卷調查及主題性啟發圖片，
誘發英語課堂更多口說練習機會。
延伸閱讀:新舊世代的連接點:Interchange 5E介紹
★購買提示： 可至「相關下載」下載劍橋CLMS線上平台使用教學。
A brand new edition of the world's most popular English course!
Interchange is a four-level, American English course that has been used by over 50 million students worldwide. This edition has been developed with insights from thousands of experienced teachers. The series delivers a communicative approach, flexible unit structure and easy to use digital support, giving teachers the tools they need, and empowering students to achieve their goals. Teachers choose Interchange because it works.
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【簡介】
本書譯自Hong Xiao(蕭宏) 原著「Introduction to Semiconductor Manufacturing Technology」(第二版)，提供最新的半導體製程相關加工技術之介紹與各種加工原理之說明與應用，是半導體製程實務最為鉅細靡遺的著作。本書適用於大學、科大電子、電機、資工、機械系『半導體工程』、『半導體製程』、『半導體導論』課程使用。
1.本書的內容集中在最新的積體電路製程技術同時也兼顧早期的技術以便讀者對積體電路製程技術的歷史發展有更完整的瞭解。
2.書內提供半導體製程相關加工技術之介紹與各種加工原理之說明與應用，使學生熟悉各種加工原理及其應用領域，以作為投入電子工業之基礎訓練課程。
3.此書委實是對半導體製程實務最為鉅細靡遺的著作，作為技術人員的工具書或有興趣了解晶圓廠的教科書，都是最適合的寶典。
【目錄】
第一章 導論
1.1 簡史
1.2 概述
1.3 本章總結
習題
參考文獻
第二章 積體電路製程介紹
2.1 IC製程簡介
2.2 IC的良率
2.3 無塵室技術
2.4 IC晶圓廠的基本結構
2.5 IC測試與封裝
2.6 近期的發展
2.7 本章總結
習題
參考文獻
第三章 半導體基礎
3.1 半導體基本概念
3.2 半導體基本元件
3.3 IC晶片
3.4 IC基本製程
3.5 互補式金屬氧化物電晶體
3.6 2000後半導體製程發展趨勢
3.7 本章總結
習題
參考文獻
第四章 晶圓製造、磊晶成長和基板工程
4.1 簡介
4.2 為什麼使用矽材料
4.3 晶體結構與缺陷
4.4 從矽砂到晶圓
4.5 磊晶矽生長技術
4.6 基板工程
4.7 未來趨勢
4.8 本章總結
習題
參考文獻
第五章 加熱製程
5.1 簡介
5.2 加熱製程的硬體設備
5.3 氧化製程
5.4 擴散
5.5 退火過程
5.6 高溫化學氣相沉積
5.7 快速加熱製程(RTP)系統
5.8 加熱製程近年發展
5.9 本章總結
習題
參考文獻
第六章 微影製程
6.1 簡介
6.2 光阻
6.3 微影製程
6.4 微影技術的發展趨勢
6.5 其他微影製程方法
6.6 極紫外光(EUV)微影技術
6.7 安全性
6.8 本章總結
習題
參考文獻
第七章 電漿製程
7.1 簡介
7.2 電漿基本概念
7.3 電漿中的碰撞
7.4 電漿參數
7.5 離子轟擊
7.6 直流偏壓
7.7 電漿製程優點
7.8 電漿增強化學氣相沉積及電漿蝕刻反應器
7.9 遠距電漿製程
7.10 高密度電漿(HDP)製程
7.11 本章總結
習題
參考文獻
第八章 離子佈植製程
8.1 簡介
8.2 離子佈植技術簡介
8.3 離子佈植技術硬體設備
8.4 離子佈植製程
8.5 安全性
8.6 近年發展及應用
8.7 本章總結
習題
參考文獻
第九章 蝕刻製程
9.1 蝕刻製程簡介
9.2 蝕刻製程基礎
9.3 濕式蝕刻製程
9.4 電漿(乾式)蝕刻製程
9.5 電漿蝕刻製程
9.6 蝕刻製程發展趨勢
9.7 蝕刻工藝的檢驗和計量
9.8 最新進展
9.9 本章總結
習題
參考文獻
第十章 化學氣相沉積與介電質薄膜
10.1 簡介
10.2 化學氣相沉積
10.3 介電質薄膜的應用於CMOS IC
10.4 介電質薄膜特性
10.5 介電質CVD製程
10.6 旋轉塗佈矽玻璃(Spin-on Glass,SOG)
10.7 高密度電漿CVD(HDP-CVD)
10.8 介電質CVD反應室清潔
10.9 新千禧年的介電質材料
10.10 本章總結
習題
參考文獻
第十一章 金屬化製程
11.1 簡介
11.2 導電薄膜
11.3 金屬薄膜特性
11.4 金屬化學氣相沉積
11.5 物理氣相沉積
11.6 銅金屬化製程
11.7 最新進展
11.8 安全性
11.9 本章總結
習題
參考文獻
第十二章 化學機械研磨製程
12.1 簡介
12.2 CMP硬體設備
12.3 CMP研磨漿
12.4 CMP基本理論
12.5 CMP製程
12.6 CMP製程近年發展
12.7 本章總結
習題
參考文獻
第十三章 半導體製程整合
13.1 簡介
13.2 晶圓準備
13.3 隔離技術
13.4 井區形成
13.5 電晶體製造
13.6 高k金屬閘極MOSFET
13.7 連線技術
13.8 鈍化
13.9 本章總結
習題
參考文獻
第十四章 IC製程技術
14.1 簡介
14.2 1980年代CMOS製程流程
14.3 1990年代CMOS製程流程
14.4 2000年代CMOS製程流程
14.5 2010年代CMOS製程流程
14.6 記憶體晶片製造製程
14.7 本章總結
習題
參考文獻
第十五章 3D IC元件的製造過程
15.1 引言
15.2 埋入式閘極字元線DRAM
15.3 3D-NAND 快閃記憶體
15.4 高介電質、金屬閘極FinFET CMOS製造
15.5 本章總結
習題
參考文獻
第十六章 總結與未來趨勢
參考文獻
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【經典溝通式教學法成人主教材全新大改版!!】
由ELT溝通式教學法大師Jack C. Richards所精心研發編寫，共分為四個級數，各級數亦提供 A/B上下兩冊版本，彈性配合老師授課時數安排。
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加入全新聽力及閱讀篇章，並融入最新時事，提供師生與時俱進的討論話題。
Updated Images:
以多元實境照片取代舊版插畫圖片，使課程內容更加生動並貼近生活。
Online Practices:
學生課本附有線上自修練習(Online Self-study)，提供互動式學習資源。
內含單字、文法、聽力、口說、閱讀及影片練習活動。
Online resources:
線上教師資源豐富完備，可供免費下載，包含: 課程音檔、分級測驗、 單元複習考題、
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Classroom App:
結合第五版課程內容，提供多元互動式課堂活動。內含：投票、問卷調查及主題性啟發圖片，
誘發英語課堂更多口說練習機會。
延伸閱讀:新舊世代的連接點:Interchange 5E介紹
★購買提示： 可至「相關下載」下載劍橋CLMS線上平台使用教學。
A brand new edition of the world's most popular English course!
Interchange is a four-level, American English course that has been used by over 50 million students worldwide. This edition has been developed with insights from thousands of experienced teachers. The series delivers a communicative approach, flexible unit structure and easy to use digital support, giving teachers the tools they need, and empowering students to achieve their goals. Teachers choose Interchange because it works.
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【經典溝通式教學法成人主教材全新大改版!!】
由ELT溝通式教學法大師Jack C. Richards所精心研發編寫，共分為四個級數，各級數亦提供 A/B上下兩冊版本，彈性配合老師授課時數安排。
Latest Topics:
加入全新聽力及閱讀篇章，並融入最新時事，提供師生與時俱進的討論話題。
Updated Images:
以多元實境照片取代舊版插畫圖片，使課程內容更加生動並貼近生活。
Online Practices:
學生課本附有線上自修練習(Online Self-study)，提供互動式學習資源。
內含單字、文法、聽力、口說、閱讀及影片練習活動。
Online resources:
線上教師資源豐富完備，可供免費下載，包含: 課程音檔、分級測驗、 單元複習考題、
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Classroom App:
結合第五版課程內容，提供多元互動式課堂活動。內含：投票、問卷調查及主題性啟發圖片，
誘發英語課堂更多口說練習機會。
延伸閱讀:新舊世代的連接點:Interchange 5E介紹
★購買提示： 可至「相關下載」下載劍橋CLMS線上平台使用教學。
A brand new edition of the world's most popular English course!
Interchange is a four-level, American English course that has been used by over 50 million students worldwide. This edition has been developed with insights from thousands of experienced teachers. The series delivers a communicative approach, flexible unit structure and easy to use digital support, giving teachers the tools they need, and empowering students to achieve their goals. Teachers choose Interchange because it works.
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【經典溝通式教學法成人主教材全新大改版!!】
由ELT溝通式教學法大師Jack C. Richards所精心研發編寫，共分為四個級數，各級數亦提供 A/B上下兩冊版本，彈性配合老師授課時數安排。
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加入全新聽力及閱讀篇章，並融入最新時事，提供師生與時俱進的討論話題。
Updated Images:
以多元實境照片取代舊版插畫圖片，使課程內容更加生動並貼近生活。
Online Practices:
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線上教師資源豐富完備，可供免費下載，包含: 課程音檔、分級測驗、 單元複習考題、
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延伸閱讀:新舊世代的連接點:Interchange 5E介紹
★購買提示： 可至「相關下載」下載劍橋CLMS線上平台使用教學。
A brand new edition of the world's most popular English course!
Interchange is a four-level, American English course that has been used by over 50 million students worldwide. This edition has been developed with insights from thousands of experienced teachers. The series delivers a communicative approach, flexible unit structure and easy to use digital support, giving teachers the tools they need, and empowering students to achieve their goals. Teachers choose Interchange because it works.
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【經典溝通式教學法成人主教材全新大改版!!】
由ELT溝通式教學法大師Jack C. Richards所精心研發編寫，共分為四個級數，各級數亦提供 A/B上下兩冊版本，彈性配合老師授課時數安排。
Latest Topics:
加入全新聽力及閱讀篇章，並融入最新時事，提供師生與時俱進的討論話題。
Updated Images:
以多元實境照片取代舊版插畫圖片，使課程內容更加生動並貼近生活。
Online Practices:
學生課本附有線上自修練習(Online Self-study)，提供互動式學習資源。
內含單字、文法、聽力、口說、閱讀及影片練習活動。
Online resources:
線上教師資源豐富完備，可供免費下載，包含: 課程音檔、分級測驗、 單元複習考題、
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結合第五版課程內容，提供多元互動式課堂活動。內含：投票、問卷調查及主題性啟發圖片，
誘發英語課堂更多口說練習機會。
延伸閱讀:新舊世代的連接點:Interchange 5E介紹
★購買提示： 可至「相關下載」下載劍橋CLMS線上平台使用教學。
A brand new edition of the world's most popular English course!
Interchange is a four-level, American English course that has been used by over 50 million students worldwide. This edition has been developed with insights from thousands of experienced teachers. The series delivers a communicative approach, flexible unit structure and easy to use digital support, giving teachers the tools they need, and empowering students to achieve their goals. Teachers choose Interchange because it works.
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Interchange 3 Student's Book with eBook
Interchange 3 Workbook
Interchange Level 3A Student's Book with eBook
Interchange Level 3B Student's Book with eBook
Interchange 3 Workbook A
Interchange 3 Workbook B
【經典溝通式教學法成人主教材全新大改版!!】
由ELT溝通式教學法大師Jack C. Richards所精心研發編寫，共分為四個級數，各級數亦提供 A/B上下兩冊版本，彈性配合老師授課時數安排。
Latest Topics:
加入全新聽力及閱讀篇章，並融入最新時事，提供師生與時俱進的討論話題。
Updated Images:
以多元實境照片取代舊版插畫圖片，使課程內容更加生動並貼近生活。
Online Practices:
學生課本附有線上自修練習(Online Self-study)，提供互動式學習資源。
內含單字、文法、聽力、口說、閱讀及影片練習活動。
Online resources:
線上教師資源豐富完備，可供免費下載，包含: 課程音檔、分級測驗、 單元複習考題、
額外學習單、課堂活動設計參考、教學資源規劃表等。
Classroom App:
結合第五版課程內容，提供多元互動式課堂活動。內含：投票、問卷調查及主題性啟發圖片，
誘發英語課堂更多口說練習機會。
延伸閱讀:新舊世代的連接點:Interchange 5E介紹
★購買提示： 可至「相關下載」下載劍橋CLMS線上平台使用教學。
A brand new edition of the world's most popular English course!
Interchange is a four-level, American English course that has been used by over 50 million students worldwide. This edition has been developed with insights from thousands of experienced teachers. The series delivers a communicative approach, flexible unit structure and easy to use digital support, giving teachers the tools they need, and empowering students to achieve their goals. Teachers choose Interchange because it works.
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