A USER'S GUIDE TO VACUUM TECHNOLOGY (3版)

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DESCRIPTION In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user. ABOUT THE AUTHOR JOHN F. O'HANLON, PHD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson. TABLE OF CONTENTS Its Basis 1. Vacuum Technology 3 2. Gas Properties 9 3. Gas Flow 25 4. Gas Release from Solids 57 Measurements 5. Pressure Gauges 81 6. Flow Meters 109 7. Pumping Speed 123 8. Residual Gas Analyzers 133 9. Interpretation of RGA Data 161 Production 10. Mechanical Pumps 183 11. Turbomolecular Pumps 201 12. Diffusion Pumps 217 13. Pump Fluids 229 14. Getter and Ion Pumps 247 15. Cryogenic Pumps 263 Materials 16. Materials in Vacuum 289 17. Joints, Seals, and Valves 313 18. Lubrication 345 Systems 19. Rough Vacuum Pumping 359 20. High Vacuum Systems 379 21. Ultraclean Vacuum Systems 403 22. High Flow Systems 415 23. Multichamber Systems 431 24. Leak Detection 447 Symbols 459 Appendixes A. Units and Constants 463 B. Gas Properties 466 C. Material Properties 478 D. Isotopic Abundances 488 E. Cracking Patterns 492 F. Pump Fluid Properties 498 Index 505