Semiconductor processes and integration (1版)

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【簡介】 Semiconductor Processes and Integration is a comprehensive book that systematically covers semiconductor fabrication and integration technologies across multiple generations of transistor architectures, including MOSFETs, FinFETs, GAAFETs, and CFETs. This book's academic contribution lies in modernizing teaching materials and bridging the gap between industry and academia. This book contains 14 chapters. It begins with the fundamentals of semiconductor materials and physics, followed by detailed discussions of key unit processes such as oxidation, lithography, ion implantation, etching, CVD, metallization, and planarization. The text further explores advanced process integration for both 2D planar and 3D FinFET devices, incorporating modern innovations such as strained silicon channels, high-k gate dielectrics, and metal gate technologies. Additionally, it introduces essential material characterization techniques, including SEM, TEM, X-ray spectroscopy, and Raman spectroscopy, and extends to emerging trends such as GAAFETs, CFETs, and 3D IC heterogeneous integration. With comprehensive coverage of mass-production technologies developed since 2010, this book serves as an indispensable reference for students, professionals, researchers, and anyone working at the forefront of semiconductor technology. 【目錄】 1 Semiconductor Integrated Circuit Development 2 Basic Semiconductor Materials 3 Base Semiconductor Devices 4 Oxidation and Heating Processes 5 Lithography 6 Diffusion and Ion Implantation Process 7 Etching Process 8 Dielectric Films and Chemical Vapor Deposition 9 Metallization Process 10 CMOSFET Process Integration 11 Advanced Device Process 12 FinFET Process Integration 13 Semiconductor Materials Analysis Technology 14 GAAFET and CFET to 3D IC Heterogeneous Integration

Fundamentals of Semiconductor Materials and Devices (1版)

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【簡介】 Semiconductors are the foundation of the electronics industry, and are therefore embedded in virtually all modern technology. No engineer or materials scientist can be without an understanding of this essential field. Since semiconductors are also the foundation of solar cells, they play an increasingly critical role in the transition to sustainable technology and promise, as a result, to become even more central in global technological progress. Fundamentals of Semiconductor Materials and Devices is a textbook that presents the advanced principles underlying semiconductors in an accessible and comprehensive way. Combining material from both engineering and physics, it remains grounded throughout in practical applications of semiconductors. Its approach makes it ideal for readers looking to gain a thorough understanding of this ubiquitous technology. Fundamentals of Semiconductor Materials and Devices readers will also find: Questions and exercises to stimulate learning and increase comprehension Introductory chapters detailing the fundamentals of quantum and solid state physics, as well as the foundational principles of semiconductor tech Detailed analysis of topics including flash memory, the quantum dot, two-dimensional semiconductor materials, and more Fundamentals of Semiconductor Materials and Devices is a valuable guide for students and researchers in any area of engineering, physics, or materials science. 【目錄】 Chapter 1 Introduction to Quantum Mechanics Chapter 2 Semiconductor Physics Chapter 3 The p-n Junction Diode Chapter 4 Photon Emission and Absorption Chapter 5 Semiconductor Devices Based on the p-n Junction Chapter 6 The Metal Oxide Semiconductor Field Effect Transistor Chapter 7 The Quantum Dot Chapter 8 Organic Semiconductor Materials and Devices Chapter 9 One- and Two-Dimensional Semiconductor Materials and Devices Appendix 1: Physical Constants Appendix 2: Derivation of the Uncertainty Principle Appendix 3: Derivation of Group Velocity Appendix 4: Reduced Mass Appendix 5: The Boltzmann Distribution Function Appendix 6: Properties of Semiconductor Materials Appendix 7: Calculation of the Bonding and Antibonding Orbital Energies Versus Interproton Separation for the Hydrogen Molecular Ion

Compound Semiconductor Bulk Materials and Characterizations (1版)

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This book is concerned with compound semiconductor bulk materials, and has been written for students, researchers and engineers in material science and device fabrication. It provides the elementary and intermediate knowledge of compound semiconductor bulk materials necessary for entry into this field. The first volume described the physical properties, crystal growth technologies, principles of crystal growth, various defects in crystals, characterization techniques and applications, and reviewed various III-V and II-V compound semiconductor materials. In this second volume, other materials are reviewed, including those that have recently received attention such as GaN, AlN, SiC and ZnO for optical and electronic devices.